147.
(11) Patent number: 2149366
(46) Date of publication: 20.05.2000
(51) Int. Cl.7: G 01 J 5/58, H 01 L 21/66
(21) Application number: 98107404/28
(22) Application date: 14.04.1998
(71) Applicant:
Institut fiziki poluprovodnikov SO RAN,
Dvoretskij Sergej Alekseevich,
Dulin Sergej Afanas'evich,
Mikhajlov Nikolaj Nikolaevich,
Rykhlitskij Sergej Vladimirovich,
Sidorov Jurij Georgievich
(72) Inventor:
Dvoretskij S.A.,
Dulin S.A.,
Mikhajlov N.N.,
Rykhlitskij S.V.,
Sidorov Ju.G.
(73) Proprietor:
Institut fiziki poluprovodnikov SO RAN,
Dvoretskij Sergej Alekseevich,
Dulin Sergej Afanas'evich,
Mikhajlov Nikolaj Nikolaevich,
Rykhlitskij Sergej Vladimirovich,
Sidorov Jurij Georgievich
(98) Mail address:
630090, g.Novosibirsk, pr. Ak. Lavrent'eva 13, Institut fiziki poluprovodnikov SO RA
(54) PROCESS OF CONTACTLESS MEASUREMENT OF TEMPERATURE
(57)
FIELD: measurement technology, determination of temperature of optically smooth surfaces of various heated objects. SUBSTANCE: process of contactless measurement of temperature includes reception of thermal radiation of object, spectral filtration, modulation, detection, amplification on modulation frequency of it, extraction of variable component. Radiation of object is registered at angle to normal to radiation surface equal to major incidence angle. Orthogonally polarized components of object radiation are modulated by way of sequential commutation on to detector, component proportional to difference of orthogonally polarized radiation components used to determine temperature of object is extracted from detected signal. EFFECT: simplified adjustment of equipment, exclusion of effect of heated elements of structure of vacuum chamber on measurement result. 1 dwg
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