145.
(11) Patent number: 2157513
(46) Date of publication: 10.10.2000
(51) Int. Cl.7: G 01 J 4/04
(21) Application number: 99104550/28
(22) Application date: 05.03.1999
(71) Applicant:
Konstruktorsko-tekhnologicheskij institut prikladnoj mikroehlektroniki SO RAN
(72) Inventor:
Fedorinin V.N.
(73) Proprietor:
Konstruktorsko-tekhnologicheskij institut prikladnoj mikroehlektroniki SO RAN
(98) Mail address:
630090, g.Novosibirsk, ul. Nikolaeva 8, Konstruktorsko-tekhnologicheskij institut prikladnoj mikroehlektroniki SO RA
(54) ELLIPSOMETRIC TRANSMITTER
(57)
FIELD: examination of chemical and physical properties of surface, measurement of physical constants and parameters of materials. SUBSTANCE: ellipsometric transmitter includes radiation source, polarizer, compensator, examined object. Radiation incident on polarizer is split into two beams by front of light wave. Beams reflected by or passed through examined object are recorded by two photodetectors. Two analyzers are placed in front of photodetectors. Polarization planes of analyzers are turned through 90 degrees one relative another. EFFECT: diminished optical length of transmitter, possibility of usage of film polarizers and high sensitivity of measurement. 3 dwg
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