Chapter 1 Introduction ................................................. 1 Chapter 2 Single Ion Induced Spike Effects on Thin Metal Films: Observation and Simulation ................................... 7 S.E.Donnelly, R.C.Birtcher, and K.Nordlund Chapter 3 Ion Beam Effects in Magnetic Thin Films ..................... 79 John E.E.Baglin Chapter 4 Selected Topics in Ion Beam Surface Engineering ............ 117 D.B.Fenner, J.K.Hirvonen, and J.D.Demaree Chapter 5 Optical Effects of Ion Implantation ........................ 229 P.D.Townsend and P.J.T.Nunn Chapter 6 Metal Alloy Nanoclusters by Ion Implantation in Silica ..... 279 P.Mazzoldi, G.Mattei, C.Maurizio, E.Cattaruzza, and F.Gonella Chapter 7 Intrinsic Residual Stress Evolution in Thin Films During Energetic Particle Bombardment ...................... 325 A.Misra and M.Nastasi Chapter 8 Industrial Aspects of Ion-Implantation Equipment and Ion Beam Generation .................................... 393 Koji Matsuda and Masayasu Tanjyo Chapter 9 Nanostructured Transition-Metal Nitride Layers ............. 431 Daniel Gall Chapter 10 Nuclear Tracks and Nanostructures ......................... 491 Robert L.Fleischer Chapter 11 Forensic Applications of Ion-Beam Mixing and Surface Spectroscopy of Latent Fingerprints ............... 523 Charles H.Koch Glossary ............................................................. 543 Index ................................................................ 553